SANTA BARBARA, Calif.--(BUSINESS WIRE)--Bruker today launched the Dimension EdgeTM PSS Atomic Force Microscope (AFM), a production-environment AFM specifically tailored for patterned sapphire substrate (PSS) metrology in high brightness light-emitting diode (HB-LED) manufacturing. The Dimension Edge PSS is an easy-to-operate AFM that delivers resolution far beyond traditional optical techniques while at the same time providing precise 3D profile information to control the most advanced PSS processes. The system performs automated measurement, data collection, data analysis and report generation on 2- to 6-inch wafers for production metrology applications, and offers a multitude of AFM capabilities essential for LED R&D. The Dimension Edge PSS comes with Bruker’s exclusive AutoMETTM software package, which greatly improves manufacturing productivity by fully automating AFM data collection and analysis report generation to provide a PASS/FAIL output for technician operation.
