Mott FLP Series High Purity Filters Proven Particle Reduction in ALD & CVD Processes

Mott FLP 515 Series filters are designed for filtration of low vapor pressure gases generated from a mixture of liquid chemical or solid sources. These high temperature vapors are generated in a direct liquid injection system, where the process utilizes a vaporization chamber or from a bubbler system using carrier gas.

Farmington, CT: Mott FLP 515 Series filters are designed for filtration of low vapor pressure gases generated from a mixture of liquid chemical or solid sources. These high temperature vapors are generated in a direct liquid injection system, where the process utilizes a vaporization chamber or from a bubbler system using carrier gas.

These FLP filters offer very low differential pressure with adequate filter media surface area to capture particles from migrating downstream. Also, the stainless steel filter media withstands the temperatures (up to 450°C) needed to keep the low pressure gases, precursor vapors and vaporized organometallics in the gas phase.

Mott has published a new cutsheet to promote the advantages in ALD (Atomic Layer Deposition) and CVD (Chemical Vapor Deposition), both of which are key processes in the manufacture of semiconductor devices.

About Mott: Founded in 1959, Mott’s strategic vision is to deliver technological breakthroughs where none currently exist. Mott’s highly customized precision filtration and fluid control platforms deliver 2X performance advantage for a range of mission critical applications, from missions to Mars to implantable medical devices. Headquartered in Farmington, CT, Mott is a 100% Employee Owned Company with offices worldwide. For more information, visit www.mottcorp.com

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