Bruker Corporation Introduces New AFM Semiconductor Characterization Solution
4/4/2013 11:58:10 AM
SANTA BARBARA, Calif.--(BUSINESS WIRE)--Bruker announced today the release of the Dimension Icon® SSRM-HR, a new atomic force microscope (AFM) configuration including the Scanning Spreading Resistance Microscopy (SSRM) module, designed specifically for high-resolution (HR) semiconductor characterization. Integrating Bruker’s industry-leading Dimension Icon AFM platform with an environmental control system capable of 1ppm gas purity and high-vacuum control, the Dimension Icon SSRM-HR system provides vastly improved repeatability and spatial resolution in semiconductor carrier profiling. As confirmed by Imec (www.imec.be), buried gate oxide layers as thin as 5Å are detected routinely.