1. Singapore, 20 December 2012- Nikon Corporation (Makoto Kimura, President) and
A*STAR Institute of Microelectronics (IME), a leading semiconductor research institute
of Singapore, have announced a collaboration with an agreement to jointly set up a
research and development (R&D) laboratory to develop advanced optical lithography
technology used in the manufacturing of semiconductor chips.
2. Nikon and IME will collaborate on technologies such as multiple patterning and
directed self assembly techniques to drive the extension of ArF Deep Ultraviolet (DUV)
dry and immersion lithography down to geometry of 20nm and beyond, targeting
advanced applications including logic, high density memory, embedded non-volatile
memory, high-speed electronics and nanophotonics, and nano-electromechanical
systems (NEMS).
3. For Nikon, this is a strategic addition to new capabilities in Singapore. This
collaboration will allow Nikon to tap into IME’s advanced R&D infrastructure, process
technology and talent pool to get early insights into its next-generation systems which
will shorten time-to-market. It will open opportunities to Nikon to learn required
technology for future process, and continue pushing ArF immersion lithography for
several device nodes.
4. The new capabilities will enhance and expand IME’s joint collaborations with industry
partners, research institutes and universities to develop advanced technologies such as
metrology and materials for further technology shrinkage as well as manufacturing
excellence. The Joint Lab exemplifies how IME is able to develop and nurture a local
ecosystem for advanced R&D through partnerships with leading corporations.
5. “Through this collaboration with IME, Nikon will gain knowledge of future process
technology and total solution, which will be important for our lithography system
development. We are very excited to partner with one of the most advanced and
established institute in the Asia region,” said Mr. Kazuo Ushida, President of Nikon
Precision Equipment Company.
6. “The Joint Lab synergizes IME and Nikon capabilities to drive R&D leading to future
technology nodes. Nikon is an ideal technology partner well established in technical excellence to help IME enhance and expand our R&D capabilities to meet the needs of
the industry,” said Prof. Dim-Lee Kwong, Executive Director, IME. “The Joint Lab is a
significant milestone for advanced semiconductor R&D in Singapore.”
About Institute of Microelectronics (IME)
The Institute of Microelectronics (IME) is a research institute of the Science and
Engineering Research Council of the Agency for Science, Technology and Research
(A*STAR). Positioned to bridge the R&D between academia and industry, IME's mission
is to add value to Singapore's semiconductor industry by developing strategic
competencies, innovative technologies and intellectual property; enabling enterprises to
be technologically competitive; and cultivating a technology talent pool to inject new
knowledge to the industry. Its key research areas are in integrated circuits design,
advanced packaging, bioelectronics and medical devices, MEMS, nanoelectronics, and
photonics. For more information, visit IME on the Internet: http://www.ime.a-star.edu.sg.
About Agency for Science, Technology and Research (A*STAR)
The Agency for Science, Technology and Research (A*STAR) is the lead agency for
fostering world-class scientific research and talent for a vibrant knowledge-based and
innovation-driven Singapore. A*STAR oversees 14 biomedical sciences, and physical
sciences and engineering research institutes, and seven consortia & centre, which are
located in Biopolis and Fusionopolis, as well as their immediate vicinity. A*STAR
supports Singapore's key economic clusters by providing intellectual, human and
industrial capital to its partners in industry. It also supports extramural research in the
universities, hospitals, research centres, and with other local and international partners.
About Nikon Corporation
Nikon has been a pioneer in optical technology markets worldwide since its inception in
1917. Today, we offer a wide range of products utilizing advanced technologies, from
consumer optics such as digital cameras, camera-related products and binoculars, to
industrial precision equipment including IC and LCD steppers and scanners,
microscopes and measuring instruments. For more information about Nikon, access
Nikon web site at http://www.nikon.com/.
For IME
Media Contact:
Cindy Chew
Institute of Microelectronics
DID: +65 6770 5375
Email: chewwfc@ime.a-star.edu.sg
For Nikon
Media Contact:
Press inquiries:
T. Kaneko
Public Relations Section, Corporate Communications & IR Dept.
Corporate Strategy Center,
NIKON CORPORATION
Shin-Yurakucho Building, 12-1 Yurakucho,
1-chome, Chiyoda-ku, Tokyo 100-8331 Japan
Tel +81-3-3216-1032
Customer inquiries:
Y. Kitamura, Company Strategy Section, Business Planning Dept.
Planning Headquarters. Precision Equipment Company,
NIKON CORPORATION
Shin-Yurakucho Building, 12-1 Yurakucho,
1-chome, Chiyoda-ku, Tokyo 100-8331 Japan
Tel +81-3-3216-1344