FEI Company Helios 1200AT DualBeam System Accelerates Process Development and Ram
6/6/2013 9:36:29 AM
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HILLSBORO, Ore., June 6, 2013 (GLOBE NEWSWIRE) -- FEI (Nasdaq:FEIC) today released the Helios NanoLab™ 1200AT, the newest generation of its full-wafer DualBeam™ analysis systems. The addition of an optional automated FOUP (front opening universal pod) loader allows location of the Helios NanoLab 1200AT system inside the semiconductor wafer fab, where its scanning electron microscope (SEM) imaging and precise focused ion beam (FIB) milling are used by engineers to extract ultrathin samples of targeted structures and defects for examination in a high-resolution transmission electron microscope (TEM).
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